| Dr. Schätzler, Katharina |
Head Cleanroom Center |
| Prof. Dr.-Ing. Utz, Marcel |
Head of Division III |
| Prof. Dr. Weber, Marc |
Head of Division V |
| Prof. Dr. Robitzki, Andrea |
Head of Divison I, Chairperson of the Steering Committees |
| Prof. Dr. sc. techn. ETH Korvink, Jan Gerrit |
Institute Head IMT |
| Prof. Dr.-Ing. Brandner, Jürgen |
Scientific Coordinator KarlTech-Section Nanostructuring and Analytics |
| Prof. Dr.-Ing. Koos, Christian |
Scientific Coordinator KarlTech-Section Optics and Photonics |
| Prof. Dr. Kempf, Sebastian |
Scientific Coordinator KarlTech-Section Superconducting Sensors |
| Prof. Dr. Müller, Anke-Susann |
Vice-Provost Infrastrukturen |
